Bow/Warp/Planarity
Warp and bow measurement of an 8″ silicon wafer. The rotated 3D view clearly shows the warp. Measurement was performed with a StraDex f-24 sensor head.
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Stand-alone systems for Bow/Warp/Planarity
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Sensor heads for Bow/Warp/Planarity
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Software for Bow/Warp/Planarity
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