roughness/waviness
SemDex M31
The low-cost completely manual system permits point-by-point measurement of (substrate) layer thicknesses. Up to 12″ wafers can be measured.
TopoSpect
TopoSpect is a valuable tool for persons performing various manual measurements. Measuring tasks such as interior space, circle, line, or spiral measurements can simply be intuitively parameterized and executed with the aid of a wizard. The results of a measurement can subsequently be visualized as statistical, polar, 2D, and 3D representations. There is also scope for application of various mathematical operations such as decentration, circle corrections, or averaging filters to the measured data.
TopoLine
TopoLine software is used to perform a wide variety of measuring tasks and data analyses. Use of Visual Basic script language makes measuring protocols highly flexible and readily modifiable, facilitating use in almost all industries/applications.
TopoLine has its own Visual Basic interface providing access to all integrated mathematical filters, as well as automated control of the ISIS sensor.
StratoSpect
StratoSpect is used for measuring the thickness of films, including intermediate layers. The results of a measurement can subsequently be visualized as statistical, FFT, 2D, and 3D representations; furthermore, it is also possible to apply various mathematical filters. The measuring tasks can easily be parameterized with the aid of a wizard.
Principal features of “StratoSpect” software:
SemDex M21
The low-cost completely manual system permits point-by-point measurement of (substrate) layer thicknesses. Up to 8″ wafers can be measured.
