Fast and robust measurement; repetition rate 4 kHz
StraDex t6 for Measurement of Thin Film Thickness
Optical Sensor for Non-contact Inline Measurement of Thin Films and Coatings
The StraDex t series of instruments was developed for non-contact measurement of transparent films or coatings on wafers/semiconductors. The sensors permit determination of layer thicknesses down to 300 nm. Measuring up to 4000 points per second, they generate complete layer profiles in a very short time.
This was accomplished with the aid of fast interferometric technology and appropriate efficient calculation algorithms.
Use of an x/y stage in the overall SemDex system permits 2D examination of thin layers.
Metrology:
- Thin layer > 0.2 µm
Features:
- Non-contact measurement
- Layer thickness range: 0.3 – 15 µm
- Fast and robust measurement; repetition rate 4 kHz
- Repeatabilities: down to 1 nm
- Universally applicable with min. working distance of 10 mm; focussing over a height of 5 mm
- Highly compact design
- User-friendly StratoSpect software
