SemDex 151
SemDex 151 with connected laptop for immediate presentation of measurement results
SemDex 151
Semi-automatic Table-top Wafer Inspection System with Integrated Optical Metrology for a Wide Range of Applications
Metrology:
Features:
- Easy manual loading, fast automated measurement
- Compact table-top instrument with optimised footprint
- Accepts wafers measuring up to 150 mm (6")
- Framed and unframed wafers
- Optional vacuum chucks
- Integrated vacuum generation for fixing wafers
- Optionally available with high-resolution CMOS camera
- Air-suspended measuring table for vibration-free measurement
- Calibration body integrated into chuck
- Available in coated steel housing
- User-friendly WaferSpect software
Industries / Applications: