SemDex A32
Production inspection in a clean room
Thin Films and Coatings
In order to attain complex structures on semiconductors and to accommodate layered structures of ever-increasing functionality in the smallest possible space, the coatings applied are becoming progressively thinner.
And these extremely thin layers, generally measuring less than 1 µm, have to be applied homogeneously and in exactly the right thicknesses. Moreover, the high lateral resolution of the StraDex t sensor installed in a SemDex wafer-inspection system also permits applications in very small areas, for example in MEMS production.
Measuring systems for:
Thin Films and Coatings
